Fees
| Service | Govt/Univ rate | Industry rate | Unit |
|---|---|---|---|
| Staff time* | $49.00 | $125.00 | Hours |
| DC/RF sputtering | $25.00 | $50.00 | Run |
| PECVD deposition | $25.00 | $50.00 | Run |
| PECVD plasma treatment | $12.50 | $25.00 | Run |
| E-beam | $37.50 | $75.00 | Run |
| Polyimide patterning | $50.00 | $100.00 | Batch |
| Photoresist patterning | $25.00 | $50.00 | Batch |
| Metal etching | $25.00 | $50.00 | Batch |
| Lift-off | $25.00 | $50.00 | Batch |
| Substrate cleaning | $12.50 | $25.00 | Batch |
| Precious metal fee | $0.03 | $0.03 | Å/Run |
| Phototool generation | $352.00 | $352.00 | Foil |
| Phototool generation | $704.00 | $704.00 | Quartz |
*Staff time covers all BMMSL staff labor including: job processing; training (for the operation of equipment and client seminars on technologies & processes); and process design and optimization.
